Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2006.05a
  • /
  • Pages.1404-1408
  • /
  • 2006
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
권호 표지

Development of the Hybrid Vibration Isolator for Large Superprecision Stage

대형 초정밀 스테이지용 복합 아이솔레이터 개발

  • 김원겸 (중앙대학교 기계공학부) ;
  • 정순철 (중앙대학교 대학원 기계공학부) ;
  • 장승환 (중앙대학교 기계공학부) ;
  • 이재응 (중앙대학교 기계공학부) ;
  • 신동수 (마이크로모션테크놀러지) ;
  • 이재정 (마이크로모션테크놀러지)
  • Published : 2006.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper, a hybrid-type vibration isolator which has air chamber(spring) and viscous damper in series is developed. The developed vibration isolator is designed to perform 3 following functions : spring function for normal operating conditions, damping function to reduce an impact for sudden move of upper beam, and finally leveling function. Based on the given natural frequency and damping factor, the design procedure is proposed. The performance of the developed isolator is tested by measuring stiffness and damping.

Keywords