A Design of Active Vibration Control System Using Electromagnetic Actuators

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The pneumatic isolator is widely adopted for anti-vibration of precision measuring and manufacturing equipments. But, when the precision demand on anti-vibration is extreme or the load is moving, the performance of anti-vibration can not meet satisfaction. In these cases, as a complementary, active vibration suppression system can be added for advanced performance. In this paper, an active control system is presented, which uses electromagnetic actuators for vibration suppression. The anti-vibration characteristic of pneumatic isolator is analyzed for system modeling and actuator specifying. The modeling and the 3D dynamic simulation is performed for control system design. For the electromagnetic actuator design, the magnetic flex density and the current-force characteristic analysis are achieved.