Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

The Modelling of Carbon Plume by Pulsed-laser ablation Method

PLAD법에 의한 탄소 플라즈마의 모델링

  • So, Soon-Youl (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Chung, Hae-Deok (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Lee, Jin (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Park, Gye-Choon (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Kim, Chang-Sun (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Moon, Chae-Joo (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University)
  • 소순열 (목포대학교 전기제어신소재공학부) ;
  • 정해덕 (목포대학교 전기제어신소재공학부) ;
  • 이진 (목포대학교 전기제어신소재공학부) ;
  • 박계춘 (목포대학교 전기제어신소재공학부) ;
  • 김창선 (목포대학교 전기제어신소재공학부) ;
  • 문채주 (목포대학교 전기제어신소재공학부)
  • Published : 2006.05.19
Download PDF
⟨ Previous Next ⟩

Abstract

The study on laser-ablation plasmas has been strongly interested in fundamental aspects of laser-solid interaction and consequent plasma generation. In particular, this plasma has been widely used for the deposition of thin solid films and applied to the semiconductors and insulators. In this paper, we developed and discussed the generation of carbon ablation plasmas emitted by laser radiation on a solid target, graphite. The progress of carbon plasmas by laser-ablation was simulated using Monte-Carlo particle model under the pressures of vacuum, 1 Pa, 10 Pa and 66 Pa. At the results, carbon particles with low energy were deposited on the substrate as the pressure becomes higher. However, there was no difference of deposition distributions of carbon particles on the substrate regardless of the pressure.

Keywords