Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.05a
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- Pages.15-19
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- 2006
The Motion of Carbon Plume in Ar Plasmas
Ar 플라즈마 상태에서의 탄소 입자 운동 모델링
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So, Soon-Youl
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Chung, Hae-Deok
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Lee, Jin
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Park, Gye-Choon
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Kim, Chang-Sun
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Moon, Chae-Joo
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University)
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소순열
(목포대학교 전기제어신소재공학부) ;
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정해덕
(목포대학교 전기제어신소재공학부) ;
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이진
(목포대학교 전기제어신소재공학부) ;
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박계춘
(목포대학교 전기제어신소재공학부) ;
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김창선
(목포대학교 전기제어신소재공학부) ;
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문채주
(목포대학교 전기제어신소재공학부)
- Published : 2006.05.19
Abstract
A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films, because it can generate highly energetic carbon clusters on a substrate. This paper was focused on the understanding and analysis of the motion of C particles in laser ablation assisted by Ar plasmas. The simulation has carried out under the pressure P=50 mTorr of Ar plasmas. Two-dimensional hybrid model consisting of fluid and Monte-Carlo models was developed and three kinds of the ablated particles which are carbon atom (C), ion (