Finite Element Simulation of Multilayer Ultrasonic Linear Motor

적층 선형 초음파 모터의 유한요소 시뮬레이션

  • Published : 2006.06.22

Abstract

In this study, multilayer structured ultrasonic linear motor was designed and simulated using ANSYS of finite element method simulator for investigating the optimum conditions of it. The ultrasonic linear motor studied in this paper designed using the 1st longitudinal($L_1$) and 4th bending vibration($B_4$). The driving voltage of the motor was very low as $V_1=5\sqrt{2}sinwt$ and $V_2=5\sqrt{2}coswt$. With the increase of the number of piezoelectric ceramic layers, displacement of node was increased. Maximum z displacement of node was about $12{\mu}m$ at the 18 layered ultrasonic motor.

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