Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
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- Pages.163-164
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- 2006
Quality prediction method by using ZnO thin film deposition process modeling
ZnO 박막 증착 공정 모델링에 의한 품질 예측 기법
- Lim, Keun-Young (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
- Chung, Doo-Yeon (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
- Lee, Sang-Keuk (Kwangwoon university) ;
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Park, Choon-Bae
(Wonkwang Univ. School of Electrical Electronic and Information Engineering)
- Published : 2006.06.22
Abstract
ZnO deposition parameters are not independent and have a nonlinear and complex properties respectively. Therefore, finding optimal process conditions are very difficult and need to do many experiments. To predict ZnO deposition result, neural network was used. To gather training data, Si, GaAs, and Glass were used for substrates, and substrate temperature, work pressure, RF power were