Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
- /
- Pages.106-107
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- 2006
Influence of Sputter Pressure on the Structural and Optical Properties of CdTe Films
Sputtering 으로 증착된 압력변화에 따른 CdTe 박막특성
- Lee, Dong-Jin (Kunsan Nat. Univ.) ;
-
Lee, Jae-Hyeong
(Kunsan Nat. Univ.)
;
-
Lee, Jong-In
(Kunsan Nat. Univ.)
;
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Jung, Hak-Kee
(Kunsan Nat. Univ.)
;
-
Jong, Dong-Su
(Kunsan Nat. Univ.)
- Published : 2006.06.22
Abstract
Cadmium telluride (CdTe) films have been prepared on Corning 7059 glass, molybdenum (Mo), and polyimide (PI) substrates by r.f. magnetron sputtering technique. The influence of the sputter pressure on the structural and optical properties of these films was evaluated. In addition, a comparison of the properties of the films deposited on fferent substrates was performed.