Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Study of Particle Removal Efficiency (PRE) with Alkaline Ozonized Water

알칼라인 오존수를 아용한 입자제거에 관한 연구

  • Lee, Seung-Ho (Department of Metallurgy and Materials Engineering, Hanyang University) ;
  • Kim, Tae-Gon (Department of Metallurgy and Materials Engineering, Hanyang University) ;
  • Lee, Jae-Hwan (Department of Metallurgy and Materials Engineering, Hanyang University) ;
  • Park, Jin-Goo (Department of Metallurgy and Materials Engineering, Hanyang University) ;
  • Bae, So-Ik (Advanced Technology Team, R&D Center) ;
  • Lee, Gun-Ho (Advanced Technology Team, R&D Center) ;
  • Kim, In-Jung (Advanced Technology Team, R&D Center)
  • Published : 2006.11.09
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Abstract

Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with $NH_4OH$ to a bath without recirculation resulted in higher PRE over 93 %.

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