한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Evaluation of LCD device parameters and rubbed surface of Polyimide by means of renormalized spectroscopic ellipsometry

  • Kimura, Munehiro (Dept. of Electrical Engineering, Nagaoka University of Technology) ;
  • Hasegawa, G. (Dept. of Electrical Engineering, Nagaoka University of Technology) ;
  • Sakamoto, H. (Dept. of Electrical Engineering, Nagaoka University of Technology) ;
  • Akahane, T. (Dept. of Electrical Engineering, Nagaoka University of Technology)
  • Published : 2006.08.22
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Abstract

Evaluating method of the device parameters of liquid crystal display (LCD) by means of the renormalized transmission spectroscopic ellipsometry is demonstrated. Dielectric and elastic constant, threshold voltage, pretilt angle, cell gap and Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the symmetrically oblique incidence transmission ellipsometry (SOITE). Furthermore, rapid evaluating method for rubbed polyimide film is also demonstrated.

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