한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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- Pages.1682-1686
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- 2006
Study of metal plate evaporation using LPS source for AMOLED
- Hwang, Chang-Hun (OLEDON Technology) ;
- Kim, Y.K. (OLEDON Technology) ;
- Shin, Kee-Hyun (Dept. of Mechanical & Aerospace Engineering, Konkuk Univ.) ;
- Ju, Sung-Hoo (Dept. of Advanced Materials Science & Engineering, Daejin Univ.) ;
- Kwon, Jang-Hyuk (Dept. of Information Display, Kyung Hee Univ.)
- 발행 : 2006.08.22
초록
The Gaussian thickness profiles in metal plate evaporation using LPS sources have been studied for the first time. Based on our experimental data, it simulates the organic thin-film uniformity of 3% and very high material usage of 81% for large size AMOLED manufacturing.
키워드