한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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- Pages.1622-1624
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- 2006
Controlled interfacial energy for UV-imprinting using resin adhesion to substrates
- Kim, Jin-Ook (Research and Development Center, LG.Philips LCD) ;
- Nam, Yeon-Heui (Research and Development Center, LG.Philips LCD) ;
- Chae, G.S. (Research and Development Center, LG.Philips LCD) ;
- Chung, In-Jae (Research and Development Center, LG.Philips LCD)
- 발행 : 2006.08.22
초록
We introduce a modified UV-imprint lithography, a resin transfer from the template to the substrate. We analyzed this method by considering the surface and interfacial free energies of the template-resinsubstrate system. This technique is purely fast and applicable to large area patterning.
키워드