한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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- Pages.1122-1125
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- 2006
Plasma Oxidation Effect on Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate
- Kim, Yong-Hae (IT Convergence & Comonents Lab., ETRI) ;
- Moon, Jae-Hyun (IT Convergence & Comonents Lab., ETRI) ;
- Chung, Choong-Heui (IT Convergence & Comonents Lab., ETRI) ;
- Yun, Sun-Jin (IT Convergence & Comonents Lab., ETRI) ;
- Park, Dong-Jin (IT Convergence & Comonents Lab., ETRI) ;
- Lim, Jung-Wook (IT Convergence & Comonents Lab., ETRI) ;
- Song, Yoon-Ho (IT Convergence & Comonents Lab., ETRI) ;
- Lee, Jin-Ho (IT Convergence & Comonents Lab., ETRI)
- 발행 : 2006.08.22
초록
The TFT performances were enhanced and stabilized by plasma oxidation of the polycrystalline Si surface prior to the plasma enhanced atomic layer deposition of
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