한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.711-714
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- 2006
Importance of Gate $SiN_x$ Properties Related to a-Si:H TFT Instability
- Tsai, Chien-Chien (AUO Technology Center, AU Optronics Corporation) ;
- Lee, Yeong-Shyang (AUO Technology Center, AU Optronics Corporation) ;
- Shih, Ching-Chieh (AUO Technology Center, AU Optronics Corporation) ;
- Hsu, Chung-Yi (AUO Technology Center, AU Optronics Corporation) ;
- Liang, Chung-Yu (AUO Technology Center, AU Optronics Corporation) ;
- Lin, Y.M. (AUO Technology Center, AU Optronics Corporation) ;
- Gan, Feng-Yuan (AUO Technology Center, AU Optronics Corporation)
- Published : 2006.08.22
Abstract
Properties of silicon nitride (
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