한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.665-668
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- 2006
The application of rapid SIMS analysis for the identification of surface contamination in TFT-LCD manufacturing
- Liou, Been-Chih (TPO, Chu-Nan) ;
- Chou, Yi-Hung (TPO, Chu-Nan) ;
- Chen, Chien-Chih (TPO, Chu-Nan) ;
- Eccles, John A. (Millbrook Instruments Ltd.)
- Published : 2006.08.22
Abstract
Sodium is a serious contamination in LTPS TFT process. It causes the abnormal characteristics of TFT in operation. Contaminated areas can be seen in SEM images, but EDX measurements do not have adequate sensitivity to confirm the presence of superficial sodium residues. We employed SIMS as a fast analysis method to map the non-uniform distribution of sodium on the surface. SIMS can also indicate the thickness of the contamination.
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