한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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- Pages.601-604
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- 2006
Transparent ZnO Transistor Array by Means of Plasma Enhanced Atomic Layer Deposition
- Kopark, Sang-Hee (Organic Display Team, ETRI) ;
- Hwang, Chi-Sun (Organic Display Team, ETRI) ;
- Kwack, Ho-Sang (Organic Display Team, ETRI) ;
- Lee, Jung-Ik (Organic Display Team, ETRI) ;
- Chu, Hye-Yong (Organic Display Team, ETRI)
- 발행 : 2006.08.22
초록
We have developed ZnO TFT array using conventional photolithography and wet etching processes. Transparent 20 nm of ultra thin ZnO film deposited by means of plasma enhanced atomic layer deposition at
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