한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.544-547
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- 2006
Large Area Plasma Characteristics using Internal Linear ICP (Inductively Coupled Plasma) Source for the FPD processing
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Kim, Kyong-Nam
(Department of Materials Science and Engineering, Sungkyunkwan University) ;
- Lim, Jong-Hyeuk (Department of Materials Science and Engineering, Sungkyunkwan University) ;
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Yeom, Geun-Young
(Department of Materials Science and Engineering, Sungkyunkwan University)
- Published : 2006.08.22
Abstract
In this study, the characteristics of large area internal linear ICP sources of
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