한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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SLS of Si Films on Polymer Substrates;Materials and Devices

  • Limanov, A.B. (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University) ;
  • Wilt, P.C. van der (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University) ;
  • Kane, M.G. (Sarnoff Corporation) ;
  • Firester, A.H. (Sarnoff Corporation) ;
  • Goodman, L. (Sarnoff Corporation) ;
  • Lee, J (Department of Materials Science and Engineering, University of Illinois) ;
  • Abelson, J.R. (Department of Materials Science and Engineering, University of Illinois) ;
  • Im, James S. (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University)
  • Published : 2006.08.22
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Abstract

A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs. In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.

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