Arrays of Microcavity Plasma Devices;Versatile Platform for The Next Generation of Plasma Displays

  • Eden, J.G. (Laboratory for Optical Physics and Engineering, University of Illinois) ;
  • Park, S.J. (Laboratory for Optical Physics and Engineering, University of Illinois)
  • 발행 : 2006.08.22

초록

Microcavity plasma devices having characteristic dimensions below $100\;{\mu}m$ have been investigated as a candidate for the next generation of plasma displays. Arrays of inverted pyramid microcavity devices, fabricated in Si with emitting apertures of $(50\;{\mu}m)^2$ and designed for AC or bipolar excitation, demonstrate a luminous efficacy above 6 lm/W at pressures up to and beyond one atmosphere of Ne/Xe mixtures. Also the design of analogous microplasma devices in ceramic multilayer structures or plastic substrates is disccussed.

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