Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.10a
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- Pages.115-116
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- 2006
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- 2005-8446(pISSN)
Study on low-k wafer engraving processes by using UV pico-second laser
UV pico-second 레이저를 이용한 low-k 웨이퍼 인그레이빙 특성 연구
- Moon, S.W. (Institute for Advanced Engineering) ;
- Bae, H.S. (Institute for Advanced Engineering) ;
- Hong, Y.S. (Institute for Advanced Engineering) ;
- Nam, G.J. (Institute for Advanced Engineering) ;
- Kwak, N.H. (JET TECH., LTD)
- Published : 2006.10.18