Nonlinearity compensation for laser interferometer using adaptive algorithm

적응형 알고리즘에 의한 레이저 간섭계의 비선형성 오차 보정

Because of its long measurement range and ultra-precise resolution. the heterodyne laser interferometer systems are very common in various industry area such as semiconductor manufacturing. However the periodical nonlinearity property caused from frequency mixing is an obstacle to improve the high measurement accuracy in nanometer scale. In this paper to minimize the effect of nonlinearity, we propose an adaptive nonlinearity compensation algorithm. We first compute compensation parameters using least square (LS) with the capacitance displacement sensor as a reference input. We then update the parameters with recursive LS (RLS) while the values are optimized to modify the elliptical phase into circular one. Through comparison with some experimental results of laser system, we demonstrate the effectiveness of our proposed algorithm.