비접촉 레이저 광센서의 성능 향상을 위한 센서보정에 관한 연구

Development of a Sensor Calibration to Enhance the Performance of a Non-contact Laser Optical Sensor Unit

Flat panel image display devices such as TFT LCD and PDP have required more large area and high quality control components. To control the qualities of the components, measurements of the flatness of a plate glass has been required. In order to measure the shape of the specular objects, Non-Contact Optical Sensor using Hologram laser unit was proposed. The sensor has a optical system that is composed of a Hologram laser and objective lens. The temperature of the sensor body is controlled by TEC(Thermoelectric Cooler) to maintain the same wavelength of the diode laser. In this research, we proposed the calibration scheme to make sensor real time measuring sensor. From the experimental results we see that the proposed sensor unit can measure the position of the glass surface in rial time.