Proceedings of the Polymer Society of Korea Conference (한국고분자학회:학술대회논문집)

The Polymer Society of Korea (한국고분자학회)
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Nondestructive, Quantitative Synchrotron Grazing Incidence X-ray Scattering Analysis of Cylindrical Nanostructure in Supported Thin Films

  • Yoon, Jin-Hwan (Department of Chemistry, National Research Lab for Polymer Synthesis & Physics, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems, and BK School of Molecular Science) ;
  • Yang, Seung-Yun (National Creative Research Initiative Center for Block Copolymer Self-Assembly, Department of Chemical Engineering and School of Environmental Science & Engineering Pohang University of Science and Technology) ;
  • Lee, Byeong-Du (Experimental Facility Division, Argonne National Laboratory) ;
  • Joo, Won-Chul (National Creative Research Initiative Center for Block Copolymer Self-Assembly, Department of Chemical Engineering and School of Environmental Science & Engineering Pohang University of Science and Technology) ;
  • Heo, Kyu-Young (Department of Chemistry, National Research Lab for Polymer Synthesis & Physics, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems, and BK School of Molecular Science) ;
  • Kim, Jin-Kon (National Creative Research Initiative Center for Block Copolymer Self-Assembly, Department of Chemical Engineering and School of Environmental Science & Engineering Pohang University of Science and Technology) ;
  • Ree, Moon-Hor (Department of Chemistry, National Research Lab for Polymer Synthesis & Physics, Pohang Accelerator Laboratory, Center for Integrated Molecular Systems, and BK School of Molecular Science)
  • Published : 2006.10.13
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Abstract

Nondestructive nanostructural analysis is indispensable in the development of nano-materials and nano-fabrication processes for use in nanotechnology applications. In this paper, we demonstrate for the first time a quantitative, nondestructive analysis of nanostructured thin films supported on substrates and their templated nanopores by using grazing incidence X-ray scattering and data analysis with a derived scattering theory. Our analysis disclosed that vertically oriented nanodomain cylinders had formed in 20-100 nm thick films supported on substrates consisting of a mixture of poly(styrene-b-methyl methacrylate) (PS-b-PMMA) and PMMA homopolymer, and that the PMMA nanodomains were selectively etched out by ultraviolet light exposure and a subsequent rinse with acetic acid, resulting in a structure consisting of hexagonally packed cylindrical nanopores.

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