Proceedings of the Korean Institute of Intelligent Systems Conference (한국지능시스템학회:학술대회논문집)

Korean Institute of Intelligent Systems (한국지능시스템학회)
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Prewarping Techniques Using Fuzzy system and Particle Swarm Optimization

퍼지 시스템과 Particle Swarm Optimization(PSO)을 이용한 Prewarping 기술

  • 장우석 (명지대학교 정보공학과) ;
  • 강환일 (명지대학교 정보공학과)
  • Published : 2006.11.17
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Abstract

In this paper, we concentrate on the mask design problem for optical micro-lithography. The pre-distorted mask is obtained by minimizing the error between the designed output image and the projected output image. We use the particle swarm optimization(PSO) and fuzzy system to insure that the resulting images are identical to the desired image. Our method has good performance for the iteration number by an experiment.

Keywords