한국신재생에너지학회:학술대회논문집
- 2006.11a
- /
- Pages.425-428
- /
- 2006
A study on the Thermopneumatic Actuator with Phase Change for Micro Pump
상변화를 이용한 열공압형 마이크로 펌프용 액츄에이터 성능에 관한 연구
Abstract
Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is