The Role of Energetic Particle Bombardment in Deposition of Thin Film Oxide Phosphors by Sputtering

  • Lee, Cho-Yeon (Department of Advanced Materials Engineering, Chungbuk National University) ;
  • Heo, Jin-Hong (Department of Advanced Materials Engineering, Chungbuk National University) ;
  • Kim, Joo-Han (Department of Advanced Materials Engineering, Chungbuk National University)
  • Published : 2006.11.03