Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2006.05a
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- Pages.16.2-16.2
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- 2006
Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing
- Lee, Byong-Seog (Nano SOI Process Laboratory, Hanyang University) ;
- Kang, Hyun-Goo (Nano SOI Process Laboratory, Hanyang University) ;
- Park, Kyung-Woong (Nano SOI Process Laboratory, Hanyang University) ;
- Paik, Un-Gyu (Department of Ceramic Engineering, Hanyang University) ;
- Park, Jea-Gun (Nano SOI Process Laboratory, Hanyang University)
- Published : 2006.05.19
Abstract
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