TFT-LCD 산업에서의 품질마이닝 시스템

Data mining is a useful tool for analyzing data from different perspectives and for summarizing them into useful information. Recently, the data mining methods are applied to solving quality problems of the manufacturing processes. This paper discusses the problems of construction of a quality mining system, which is based on the various data mining methods. The quality mining system includes recipe optimization, significant difference test, finding critical processes, forecasting the yield. The contents and system of this paper are focused on the TFT-LCD manufacturing process. We also provide some illustrative field examples of the quality mining system.