An Investigation into Micro Valve Field and Flow Field Characteristic of 7mm Width

7mm폭의 Micro Valve 자장 및 유동특성 고찰

Recently, the micro on-off valves have been focused on core technology in the fields of the production line of semi-conductor chips and the micro fluid chips for bio-medical applications. A key characteristics for micro valve, operated by compressed air, are high speed response and great repeatability. Indeed, it is also important to keep the pressure on the cross-sectional area of the poppet to be constant regardless of the fluctuation of the pressure exerted on the ports. In this study, we have designed and analysed the high-speed and high flow rate micro on-off valve using the analogy of equivalent magnetic circuit and Finite Element Method(FEM) respectively. In case of poppet, flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.