Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.07c
- /
- Pages.1568-1569
- /
- 2006
On the deduction of electron temperature by various electric probes in RF plasma
다양한 전기탐침을 이용한 RF 플라즈마 전자온도의 측정
- Seo, V.J. (Department of Electricity & Control Engineering, Hanyang University) ;
-
Woo, H.J.
(Department of Electricity & Control Engineering, Hanyang University)
;
- Choe, G.S. (Department of Electricity & Control Engineering, Hanyang University) ;
- You, H.J. (Department of Electricity & Control Engineering, Hanyang University) ;
-
Lho, T.
(Korea Basic Science Institute)
;
-
Chung, K.S.
(Department of Electricity & Control Engineering, Hanyang University)
- 서영준 (한양대학교 전기공학과) ;
-
우현종
(한양대학교 전기공학과)
;
- 최근식 (한양대학교 전기공학과) ;
- 유현종 (한양대학교 전기공학과) ;
-
노태협
(한국기초과학지원연구원)
;
-
정규선
(한양대학교 전기공학과)
- Published : 2006.07.12
Abstract
An electric probe is a conductor inserted into the plasma, by which plasma density and electron temperature can be deduced from the collected current (I) versus applied voltage (V) to the probe. In RF plasma the I-V characteristics of electric probe is distorted due to the RF fluctuation of plasma potential, so that it is hard to measure the real plasma parameters, especially the electron temperature. To eliminate the RF fluctuation, several compensation methods are developed such as RF compensation probe, peak-to-peak method, asymmetric double probe. By comparing proposed methods, a suitable method is to be introduced in determining electron temperatures in RF plasma.
Keywords