Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2005.05a
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- Pages.254-254
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- 2005
Etch Stop Characteristics of $SrBi_2Ta_2O_9$ Thin Film by Using $CeO_2$ Buffer Layer
CeO$_2$ 완충층을 이용한 $SrBi_2Ta_2O_9$ 박막의 식각 정지 특성
- Published : 2005.05.26
Abstract
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