Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2005.05a
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- Pages.144-144
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- 2005
Surface Properties of PE-ALD $SnO_2$ Thin Film
PE-ALD 를 이용한 $SnO_2$ 박막의 표면 특성
- Published : 2005.05.26
Abstract
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