Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2005.11a
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- Pages.166-167
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- 2005
Characteristic comparison of MgO thin film deposited by In Line Type ICP Magnetron Sputtering System and E-Beam Evaporator-System
In Line Type ICP 마그네크론 스퍼터링 장치와 E-Beam Evaporation에 의한 MgO 박막 특성 비교
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