Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2005.11a
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- Pages.129-129
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- 2005
Synthesis and property evaluation of multi-layered TiAlN/$Si_{3}N_4$ thin films using unbalanced magnetron sputtering
비대칭 마그네트론 스퍼터링을 이용한 다층 TiAlN/$Si_{3}N_4$ 박막의 합성과 특성평가
- Published : 2005.11.04
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