Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2005.11a
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- Pages.119-119
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- 2005
Deposition of $TiO_2$ films by reactive ICP-sputtering
유도결합플라즈마가 적용된 반응성 스퍼터법을 이용한 $TiO_2$ 박막의 증착
- Published : 2005.11.04
Abstract
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