Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
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- Pages.155-155
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- 2005
UV Photon-Assist Ionization for Low-Temperature Plasma
- Chae, S.H. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Seo, S.H. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Chang, H.Y. (Department of Physics, Korea Advanced Institute of Science and Technology)
- Published : 2005.08.18
Abstract
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