한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2005년도 제29회 학술발표회 초록집
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- Pages.126-126
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- 2005
Deposition of SiC films with single source for MEMS applications
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Nam, S.H.
(Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
;
- Hyun, J.S. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Park, J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
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Boo, J.H.
(Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- 발행 : 2005.08.18