Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
- /
- Pages.126-126
- /
- 2005
Deposition of SiC films with single source for MEMS applications
- Nam, S.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Hyun, J.S. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Park, J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Boo, J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2005.08.18
Abstract
Keywords