Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
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- Pages.91-91
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- 2005
Si nano dots growth using pulse-type gas feeding with $Si_{2}H_{6}$ in LPCVD
- Park, Chan (Department of Nano Science & Technology, University of Seoul) ;
- Jung, Soon-Jae (Department of Nano Science & Technology, University of Seoul) ;
- Kim, Kyoung-Min (Department of Nano Science & Technology, University of Seoul) ;
- Han, Moon-Sup (Department of physics, University of Seoul) ;
- Sok, Jung-Hyun (Department of Nano Science & Technology, University of Seoul) ;
- Park, Kyoung-Wan (Department of Nano Science & Technology, University of Seoul)
- Published : 2005.08.18
Abstract
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