Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.08a
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- Pages.89-89
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- 2005
Fabrication of nc-$Si/SiO_{2}$ Multi-Layer Structure by using LPCVD
- Jung, Soon-Jae (Department of Nano Science & Technology, University of Seoul) ;
- Kim, Eun-Kyeom (Department of Nano Science & Technology, University of Seoul) ;
- Park, Chan (Department of Nano Science & Technology, University of Seoul) ;
- Han, Moon-Sup (Department of Physics, University of Seoul) ;
- Sok, Jung-Hyun (Department of Nano Science & Technology, University of Seoul) ;
- Park, Kyoung-Wan (Department of Nano Science & Technology, University of Seoul)
- Published : 2005.08.18
Abstract
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