Inductive coupled plasma chemical vapor deposition system for $SiN_{x}$:H passivation layer of top-emitting organic light-emitting diodes

• Kim, Myeong-Su (Samsung SDI Core Technology Lab.) ;
• Kim, Han-Gi (Samsung SDI Core Technology Lab.) ;
• Lee, Gyu-Seong (Samsung SDI Core Technology Lab.) ;
• Heo, Myeong-Su (Samsung SDI Core Technology Lab.) ;
• Jeong, Seok-Heon (Samsung SDI Core Technology Lab.) ;
• Kim, Gwang-Il (Samsung SDI Core Technology Lab.) ;
• Han, Dong-Won (AMOLED Business Team, Mobile Display H/Q) ;
• Gwon, Jang-Hyeok (AMOLED Business Team, Mobile Display H/Q)

• 김명수 ;
• 김한기 ;
• 이규성 ;
• 허명수 ;
• 정석헌 ;
• 김광일 ;
• 한동원 ;
• 권장혁

• Published : 2005.02.15

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