Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.02a
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- Pages.88-88
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- 2005
기판바이어스법을 이용한 다결정 실리콘 박막의 실온 제작
- Chu, Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
- Yang, Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
- Lee, Jung-Hui (Division of Electronics and Information, Chonbuk National University) ;
- Choi, Byoung-Jung (Division of Electronics and Information, Chonbuk National University) ;
- Yatsui, Kiyoshi (Extreme Energy-Density Research Institute, Nagaoka University of Technology)
- Published : 2005.02.15
Abstract
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