Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2005.02a
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- Pages.76-76
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- 2005
Thin films making by magnetron sputtering cathode having high deposition rate and wide erosion area
- Park, Jang-Sick (Mirae Engineering co. ltd) ;
- Kim, Tae-Woo (Mirae Engineering co. ltd) ;
- Heo, Jae-Eum (Department of Environment Science) ;
- Lee, Kanp-Du (Department of Environment Science) ;
- Park, Sang-Won (Department of Environment Science) ;
- Ahn, Won-Sul (Department of Chemical Engineering, Keimyung University)
- Published : 2005.02.15
Abstract
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