제어로봇시스템학회:학술대회논문집
- 2005.06a
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- Pages.1115-1117
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- 2005
3-D Simulation of Thermal Multimorph Actuator based on MUMPs process
- Klaitabtim, Don (Department of Applied Physics, Faculty of Science, King Mongkut's Institute of Technology Ladkrabang) ;
- Tuantranont, Adisorn (National Electronics and Computer Technology Center (NECTEC))
- Published : 2005.06.02
Abstract
This paper describes the three dimension model and simulation results of a thermal actuator based on polyMUMPs process, known as thermal multimorph actuator. The device has potential application in micro-transducers such as atomic force microscope (AFM) tip and scanning tunneling microscope (STM) tip. This device made of a multi-layer materials stack together with consisted of polysilicon,