제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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3-D Simulation of Thermal Multimorph Actuator based on MUMPs process

  • Klaitabtim, Don (Department of Applied Physics, Faculty of Science, King Mongkut's Institute of Technology Ladkrabang) ;
  • Tuantranont, Adisorn (National Electronics and Computer Technology Center (NECTEC))
  • Published : 2005.06.02
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Abstract

This paper describes the three dimension model and simulation results of a thermal actuator based on polyMUMPs process, known as thermal multimorph actuator. The device has potential application in micro-transducers such as atomic force microscope (AFM) tip and scanning tunneling microscope (STM) tip. This device made of a multi-layer materials stack together with consisted of polysilicon, $SiO_2$ and gold. A mask layout design, three dimension model and simulation results are reported and discussed.

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