Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2005.11a
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- Pages.929-932
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- 2005
Studies on the Pull-up MEMS Switch for the Lower Actuation Voltage and High Speed using Double Electrode
- Lee, Seong-Dae (Millimeter-wave INnovatiom Technology Research Center (MINT), Dongguk University) ;
- Jun, Byoung-Chol (Millimeter-wave INnovatiom Technology Research Center (MINT), Dongguk University) ;
- Baek, Tae-Jong (Millimeter-wave INnovatiom Technology Research Center (MINT), Dongguk University) ;
- Kim, Soom-Koo (Millimeter-wave INnovatiom Technology Research Center (MINT), Dongguk University) ;
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Kim, Sam-Dong
(Millimeter-wave INnovatiom Technology Research Center (MINT), Dongguk University)
;
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Rhee, Jin-Koo
(Millimeter-wave INnovatiom Technology Research Center (MINT), Dongguk University)
- Published : 2005.11.26
Abstract
We report a pull-up type RF MEMS switch using double electrode without elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.7 dB and an isolation of 50.7 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 80 us, respectively.
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