The Optimum Structure Design of 1005 RF Chip Inductors for GHz Band

GHz 대역을 위한 1005 RF 칩 인덕터의 최적 구조 설계

  • Kim, Jae-Wook (School of Electric, Information & Communication Eng., Hoseo Univ.) ;
  • Ryu, Chang-Keun (School of Electronic, Information & Communication Eng., Namseoul Univ.)
  • 김재욱 (호서대학교 전기정보통신공학부) ;
  • 유창근 (남서울대학교 전자정보통신공학부)
  • Published : 2005.11.26

Abstract

In this study, micro-scale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was $1.0{\times}0.5{\times}0.5mm^3$ The material and shape of the core were 96% $Al_2O_3$ and I-type. The material and number of turn of coil were copper (Cu) and 6. The diameter ($40{\mu}m$) of coil and length (0.35mm) of solenoid were determined by a Maxwell three-dimensional field simulator to maximize the performance of the inductors. High frequency characteristics of the inductance (L) and quality-factor (Q) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 10.8nH and quality factors of 25.2 at 250MHz, and show results comparable to those measured for the inductors prepared by CoilCraftTm that is one of the best chip inductor company in the world. The simulated data predicted the high-frequency data of the Land Q of the inductors developed well.

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