Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Studies on Fabrication of Novel Micromachined SIR BPF using DAML

DAML 구조를 이용한 새로운 구조의 SIR BPF 의 설계 및 제작

  • Baek, Tae-Jong (Millimeterwave INovation Research Center, Dongguk University (MINT)) ;
  • Kim, Sung-Chan (Millimeterwave INovation Research Center, Dongguk University (MINT)) ;
  • Lim, Byeong-Ok (Millimeterwave INovation Research Center, Dongguk University (MINT)) ;
  • Shin, Dong-Hoon (Millimeterwave INovation Research Center, Dongguk University (MINT)) ;
  • Rhee, Jin-Koo (Millimeterwave INovation Research Center, Dongguk University (MINT))
  • 백태종 (동국대학교 밀리미터파신기술연구센터 (MINT)) ;
  • 김성찬 (동국대학교 밀리미터파신기술연구센터 (MINT)) ;
  • 임병옥 (동국대학교 밀리미터파신기술연구센터 (MINT)) ;
  • 신동훈 (동국대학교 밀리미터파신기술연구센터 (MINT)) ;
  • 이진구 (동국대학교 밀리미터파신기술연구센터 (MINT))
  • Published : 2005.11.26
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Abstract

In this paper, we proposed a new type SIR bandpass filter using DAML. This filter is consisted of 2 layers with MEMS resonator layer and CPW feed line. DAML ring resonator is elevated with $10\;{\mu}m$ height from GaAs substrate. Using MEMS processing, we are able to realize SIR bandpass filter easily. Furthermore it is useful to integrate on conventional MMICs because it has CPW interfaces and ring resonator is isolated from substrate by air-gap. We optimized and measured the results that $S_{21}$ attenuation at rejected band is over 15 dB, insertion loss is inside the limit of 3 dB, and relative bandwidth is about 10 % at 60 GHz

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