On the Vibration Analysis of AFM Microcantilevers Using Proper Orthogonal Modes

적합직교모드를 이용한 AFM 마이크로캔틸레버의 진동 해석에 대하여

Dynamic force microscopy utilizes the dynamic response of a resonating probe tip as it approaches and retracts from a sample to measure the topography and material properties of a nanostructure. We present recent ideas based on proper orthogonal decomposition (POD) and detailed experiments that yield new perspectives and insight into AFM. A dynamic cantilever model with Lennrad-Jones interaction Potential which includes attractive and repulsive van der Waals demonstrates the resonable tapping mode response in time and frequency.