한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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- Pages.637-638
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- 2005
급속열처리를 통한 알루미나 나노템플릿의 기공 균일도 개선에 관한 연구
A Study on Improved Pore Uniformity of Nano Template Using the Rapid Thermal Processor
- Kim, Dong-Hee (Chungju National Uni.) ;
- Kim, Jin-Kwang (Chungju National Uni.) ;
- Kwon, O-Dae (Chungju National Uni.) ;
- Yang, Kea-Joon (Chungju National Uni.) ;
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Lee, Jae-Hyeong
(Kunsan National Uni.) ;
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Lim, Dong-Gun
(Chungju National Uni.)
- 발행 : 2005.07.07
초록
AAO templates were fabricated using a two-step anodization process with pretreatment such as electro polishing and annealing. To reduce process time and get well-aligned pore array, rapid thermal processor by an halogen lamp was employed in vacuum state at