한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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- Pages.412-413
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- 2005
CO 가스측정을 위한 마이크로 캔틸레버 센서의 최적화 설계
Optimum Design of Micro-Cantilever Sensor for measuring CO gas
- 손희주 (고려대학교 전기공학과) ;
- 나대석 (고려대학교 전기공학과) ;
- 백경갑 (대진대학교 전자공학과) ;
- 박배호 (건국대학교 물리학과) ;
- 권광호 (한서대학교 전자공학과) ;
- 남산 (고려대학교 신소재공학과) ;
- 주병권 (고려대학교 전기공학과)
- Son, H.J. (Department of Electrical Engineering, Korea Univ.) ;
- Na, D.S. (Department of Electrical Engineering, Korea Univ.) ;
- Peak, K.K. (Department of Electronic Engineering Daejin, Univ.) ;
- Park, B.H. (Department of Physics Konkuk, Univ.) ;
- Kwon, K.H. (Department of Electronic Engineering, Hanseo Univ.) ;
- Nahm, S. (Department of Materials Science and Engineering, Korea Univ.) ;
- Ju, B.K. (Department of Electrical Engineering, Korea Univ.)
- 발행 : 2005.07.07
초록
This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is